A chamber-cleaning gas and an etching gas used for a silicon-containing film according to the present invention comprise a perfluoro cyclic ether having 2 to 4 carbon atoms which are ether-linked with carbon atoms. The chamber-cleaning gas and the etching gas hardly generate a harmful waste gas, such as CF.sub.4, which is one of the causes for global warming so that they are good for environment. Further, they are a non-toxic gas or a volatile liquid, and are easy to use and are excellent in tre...

A heat exchanger is formed by selectively stacking an appropriate number of functionally independent and discrete heat exchange panels, each of which is a complete heat exchanger in its own right with a set of vanes and two flow passages in indirect heat exchange relationship through said vanes.

A gas adsorber which is capable of reliably removing harmful gases discharged from processes in the semiconductor industry, the ceramic industry, etc. The gas adsorber has an integral structure comprising a main treating section having an exhaust gas inlet port and packed with an adsorbent, an auxiliary treating section having a treated gas outlet port and packed with an adsorbent, and a space section provided in between the main and auxiliary treating sections, the space section having a gas ou...

An improved drive coupling and bearing assembly for a recirculation fan in a long-life gas laser unit includes a plurality of frictionless gas bearings which allow journals supporting the recirculation fan to ride on a cushion of compressed laser gas. Mechanical power is transmitted from an external source to the recirculation fan through a magnetic coupling assembly, so that the walls of the sealed laser unit do not have to be breached. Additional structure is provided for spacing the driven ma...

The present invention discloses a gas burner for a solid fuel effect gas fire. The burner comprises an integrally formed metal casing defining a gas/air mix chamber. A gas/air mix supply pipe connects with the chamber and a number of burner bores are provided in a wall of the casing. Simulated solid fuel elements can then be located above or on the said wall of the casing so as to not close said burner bores. Age will not affect the performance of the burner as can happen in prior art burners wh...

A gas-gas phase contactor/process, especially adopted for high temperature reactions, e.g., for the production of hydrochloric acid, comprises means for separately establishing at least two disparate gaseous feedstreams, means for disintegrating each such feedstream into a registered plurality of substreams thereof, one of each such substream being complementary to at least one eother, and means for establishing homogeneous unit volumes of gaseous reaction mixture which comprise said complementa...

The gas cooler has a pair of coaxial flues for the cooling of a synthesis gas wherein the flues are resiliently mounted independently of each other. The gas flow connection at the top of the pressure vessel is sized to permit the inner flue to be lifted out of the vessel for cleaning and repair purposes. In addition, the outer flue can be constructed of interconnected wall elements which may also be disconnected for discrete removal through the top of the vessel for cleaning and repair purposes.

An injection valve for injecting a gas into a gas lighter or the like comprising a valve stem operable in a valve cylinder. The valve stem carries a resilient element which seals an opening in an injection passage in the valve stem. The resilient element is of a smaller diameter than the portion of the valve cylinder in which it operates to permit gas to pass between the resilient element and the cylindrical wall when the valve stem is being displaced from a closed to an injection position. Howe...

In a gas-to-gas heat exchanger, numerous tubes extend in parallel between a pair of tubesheets that are oblique to one another. Each tube is medially curved to have its end portions normal to the respective tubesheets to which they connect, all being curved in the same direction. The medial portions of the tubes extend through a baffle disposed to bisect the acute angle between the tubesheets. Side and end walls cooperate with the baffle and tubesheets to define two cooling air passage portions,...

A gas-to-gas heat exchanger comprises a chamber through which pass upwardly at least one first tube for the passage of a first hot gaseous medium and at least one second tube for the passage of a second cooler gaseous medium. The first and second tubes are disposed in spaced-apart relationship and a fluidized bed of particulate material, for example sand, is created in the chamber in the spaces around the tubes, the fluidized bed serving as a heat transfer medium from the first tube(s) to the se...